. . "Microelectronics--Congresses"@en . _:b7iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b7iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b7iddOtlocdOtgovauthoritiessubjectssh2008107752 _:b015 . . . "Microelectronics"@en . _:b12iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b12iddOtlocdOtgovauthoritiessubjectssh2008107752 _:b13iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b12iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b13iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b13iddOtlocdOtgovauthoritiessubjectssh2008107752 "Microelectronics"@en . _:b015 . _:b015 . . . "Congresses"@en . _:b20iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b20iddOtlocdOtgovauthoritiessubjectssh2008107752 _:b21iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b20iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b21iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b21iddOtlocdOtgovauthoritiessubjectssh2008107752 "Congresses"@en . "150 $aMicroelectronics$vCongresses" . . . . . "IEEE International Conference on Micro Electro Mechanical Systems Technical digest" . . . "International Conference on Precision Machinery and Manufacturing Technology (5th : 2020 : Auckland, New Zealand) Materials and technologies in precision machinery III" . . . "International Conference on Precision Machinery and Manufacturing Technology (5th : 2020 : Auckland, New Zealand) Materials and technologies in precision machinery III : selected, peer-reviewed papers from the 5th International Conference on Precision Machinery and Manufacturing Technology (ICPMMT 2020) 3-7 February, 2020, Auckland, New Zealand" . . . "Advanced topics in optoelectronics, microelectronics, and nanotechnologies" . . . "ARFTG Conference (60th : 2002 : Washington, D.C.) Measurement needs for emerging technologies" . . . "ARFTG Conference (61st : 2003 : Philadelphia, Pa.) Measurement accuracy" . . . "Asia-Pacific Conference on Fundamental Problems of Opto- and Microelectronics (1st : 2000 : Vladivostok, Russia) Optoelectronic information systems and processing" . . . "CADSM 2001 (2001 : Slavsʹke, Ukraine, and Lʹviv, Ukraine) Experience of designing and application of CAD systems in microelectronics" . . . "CADSM 2003 (7th : 2003 : Slavsʹke, Ukraine, and Lʹviv, Ukraine) Dosvid rozrobky ta zastosuvanni︠a︡ prylado-tekhnolohichnykh SAPR v mikroelektronit︠s︡i" . . . "Challenges in process integration and device technology" . . . "Chemnitzer Fachtagung Mikromechanik & Mikroelektronik (7th : 2005 : Chemnitz, Germany) 7. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 26./27. Oktober, 2005" . . . "Colloque international sur la microélectronique avancée (1970 : Paris) Communications présentées au Colloque international sur la microélectronique avancée" . . . "Conference of the International Society for Hybrid Microelectronics--Poland Chapter Proceedings of the ... Conference of the International Society for Hybrid Microelectronics, Poland Chapter" . . . "Conference on \"Microelectronics, Microsystems, and Nanotechnology\" (1st : 2000 : Athens, Greece) Microelectronics, Microsystems, and Nanotechnology" . . . "Custom Integrated Circuits Conference Proceedings of the ... Custom Integrated Circuits Conference" . . . "Design, modeling, and simulation in microelectronics" . . . "Education in microelectronics and MEMS" . . . "Electronic Packaging Technology Conference (4th : 2002 : Singapore) Proceedings of 4th Electronics Packaging Technology Conference (EPTC 2002)" . . . "Electronic Packaging Technology Conference (5th : 2003 : Singapore) Proceedings of 5th Electronics Packaging Technology Conference (EPTC 2003)" . . . "Electronic Packaging Technology Conference (6th : 2004 : Singapore) Electronics packaging technology conference" . . . "Electronic Packaging Technology Conference (7th : 2005 : Singapore) Proceedings of 7th Electronics Packaging Technology Conference (EPTC 2005)" . . . "Electronics and structures for MEMS" . . . "Electronics and structures for MEMS II" . . . "ETG-Fachtagung (1992 : Dresden, Germany) Mikroelektronik in der Energieverteilung" . . . "European Solid State Circuits Conference (26th : 2000 : Stockholm, Sweden) ESSCIRC '2000" . . . "European Solid State Circuits Conference (2nd : 1976 : Université de Toulouse) Solid state circuits, 1976" . . . "Fundamental problems of optoelectronics and microelectronics" . . . "Future trends in microelectronics" . . . "ICMNE-2003 (2003 : Zvenigorod, Russia) Micro- and nanoelectronics 2003" . . . "IEEE Gallium Arsenide Integrated Circuit Symposium Technical digest" . . . "IEEE International Caracas Conference on Devices, Circuits, and Systems Proceedings of the ... IEEE International Caracas Conference on Devices, Circuits, and Systems" . . . "IEEE Workshop on Micro Electro Mechanical Systems (10th : 1997 : Nagoya, Japan) The Tenth Annual International Workshop on Micro Electro Mechanical Systems" . . . "IEEE Workshop on Microelectronics and Electron Devices (3rd : 2005 : Boise, Idaho) 2005 IEEE Workshop on Microelectronics and Electron Devices" . . . "Integrated Circuits Seminar Annual Integrated Circuits Seminar" . . . "International Caribbean Conference on Devices, Circuits, and Systems (6th : 2006 : Playa del Carmen, Mexico) ICCDCS 2006" . . . "International Conference and Exhibition IMAPS--Poland (26th : 2002 : Warsaw, Poland) XXVI International Conference of International Microelectronics and Packaging Society, Poland Chapter" . . . "International Conference on Advanced Semiconductor Devices and Microsystems (3rd : 2000 : Smolenice, Slovakia) ASDAM 2000" . . . "International Conference on Advanced Semiconductor Devices and Microsystems (4th : 2002 : Smolenice Castle, Slovakia) ASDAM '02" . . . "International Conference on Advanced Semiconductor Devices and Microsystems (5th : 2004 : Smolenice, Slovakia) ASDAM 2004 conference proceedings" . . . "International Conference on Heat Transfer and Transport Phenomena in Microscale (2000 : Banff, Canada) Heat transfer and transport phenomena in microscale" . . . "International Conference on Manufacturing and Packaging Techniques for Hybrid Circuits, Paris, 1976 Communications" . . . "International Conference on Microelectronics (11th : 1999 : Kuwait) ICM'99" . . . "International Conference on Microelectronics (12th : 2000 : Tehran, Iran) ICM 2000" . . . "International Conference on Microelectronics (13th : 2001 : Rabat, Morocco) ICM'2001" . . . "International Conference on Microelectronics (14th : 2002 : Beirut, Lebanon) ICM 2002" . . . "International Conference on Microelectronics (15th : 2003 : Cairo, Egypt) ICM 2003" . . . "International Conference on Microelectronics (16th : 2004 : Tunis, Tunisia) ICM 2004" . . . "International Conference on Microelectronics (17th : 2005 : Islāmābād, Pakistan) The 17th ICM 2005" . . . "International Conference on Microelectronics (23rd : 2002 : Niš, Serbia) 2002 23rd International Conference on Microelectronics" . . . "International Conference on Microelectronics (24th : 2004 : Niš, Serbia) 2004, 24th International Conference on Microelectronics" . . . "International Conference on Microelectronics (25th : 2006 : Nis̆, Serbia) 2006 25th International Conference on Microelectronics" . . . "International Microelectronics Conference Proceedings of the International Microelectronics Conference" . . . "International Microelectronics Symposium International Microelectronic Symposium" . . . "International Microelectronics Symposium Proceedings of the ... International Microelectronics Symposium" . . . "International Microprocesses and Nanotechnology Conference (1999 : Yokohama-shi, Japan) Digest of papers" . . . "International Microprocesses and Nanotechnology Conference (2003 : Tokyo, Japan) Microprocesses and nanotechnology 2003" . . . "International Society of Electrochemistry. Meeting (53rd : 2002 : Düsseldorf, Germany) Electrochemistry in molecular and microscopic dimensions" . . . "International Symposium on Electrochemical Microfabrication (1st : 1991 : Phoenix, Ariz.) Proceedings of the First International Symposium on Electrochemical Microfabrication" . . . "International Symposium on Electrochemical Microsystem Technologies (3rd : 2000 : Garmisch-Partenkirchen, Germany) Scaling down in electrochemistry" . . . "International Symposium on Electrochemical Technology Applications in Electronics (3rd : 1999 : Honolulu, Hawaii) Electrochemical technology applications in electronics" . . . "International Symposium on Microelectronics Proceedings of the ... International Symposium on Microelectronics" . . . "International Vacuum Microelectronics Conference Technical digest" . . . "International Workshop on DNA-Based Molecular Construction (2002 : Jena, Germany) DNA-based molecular construction" . . . "Internationaler Elektronik-Arbeitskreis Mikroelektronik" . . . "Italian Conference on Sensors and Microsystems (3rd : 1998 : Genova, Italy) Sensors and microsystems" . . . "Italian Conference on Sensors and Microsystems (4th : 1999 : Rome, Italy) Sensors and microsystems" . . . "Italian Conference on Sensors and Microsystems (5th : 2000 : Lecce, Italy) Sensors and microsystems" . . . "Journées nationales de microélectronique et optoélectronique III-V (6th : 1997 : Chantilly, France) JNMO'97" . . . "Micro power sources" . . . "Micro- and nanofabricated structures and devices for biomedical environmental applications II" . . . "Microcircuit Engineering (Conference) Microcircuit engineering" . . . "Microelectronic device technology III" . . . "Microelectronic structures and MEMS for optical processing II" . . . "Microelectronics" . . . "Microelectronics'94 (1994 : Zvenigorod, Russia) Microelectronics-94" . . . "Microelectronicsʾ94 (1994 : Zvenigorod, Russia) Mikroėlektronika-94" . . . "Microfabricated Systems and MEMS Symposium (6th : 2002 : Philadelphia, Pa.) Microfabricated Systems and MEMS VI" . . . "Micropower and microdevices" . . . "Microsystems engineering" . . . "Microsystems engineering" . . . "Microsystems metrology and inspection" . . . "Nano- and microtechnology" . . . "Nanostructure science, metrology, and technology" . . . "National Symposium on the Impact of Batch Fabrication on Future Computers, Los Angeles, 1965 Proceedings" . . . "Photon processing in microelectronics and photonics" . . . "Photon processing in microelectronics and photonics II" . . . "Photon processing in microelectronics and photonics III" . . . "Photon processing in microelectronics and photonics IV" . . . "SBMICRO (18th : 2003 : São Paulo, Brazil) Microelectronics technology and devices, SBMICRO 2003" . . . "SBMICRO (Conference) (17th : 2002 : Porto Alegre, Rio Grande do Sul, Brazil) Microelectronics technology and devices, SBMICRO 2002" . . . "SBMICRO (Conference) (19th : 2004 : Porto de Galinhas, Brazil) Microelectronics technology and devices, SBMICRO 2004" . . . "Smart electronics and MEMS II" . . . "Smart structures and devices" . . . "Symposium D on Group IV Heterostructures, Physics, and Devices (Si, Ge, C, [alpha]-Sn) (1996 : Strasbourg, France) Group IV heterostructures, physics, and devices (Si, Ge, C, [alpha]-Sn)" . . . "Symposium D, \"Electronics on Unconventional Substrates--Electrotextiles and Giant-Area Flexible Circuits\" (2002 : Boston, Mass.) Electronics on unconventional substrates--electrotextiles and giant-area flexible circuits" . . . "Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS (1998 : Strasbourg, France) Materials aspects in microsystem technologies" . . . "Symposium on Laser Processes for Microelectronic Applications (1987 : Honolulu, Hawaii) Proceedings of the Symposium on Laser Processes for Microelectronic Applications" . . . "System integration in micro electronics" . . . "TENCON (18th : 2003 : Bangalore, India) IEEE TENCON 2003" . . . "University/Government/Industry Microelectronics Symposium Proceedings" . . . "University/Government/Industry Microelectronics Symposium Symposium proceedings" . . . "University/Industry/Government Microelectronics Symposium Conference record" . . . "Winter Symposium 75 on Micro-Photofabrication, Palo Alto, Calif., 1975. Winter Symposium 75 on Micro-Photofabrication, February 6, 7, 1975, Palo Alto Cabana Hyatt House, Palo Alto, California" . . "[Record generated for validation purposes.]" . "sh2008107752" . . . _:b447iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b447iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b447iddOtlocdOtgovauthoritiessubjectssh2008107752 "Work cat.: Scaling down in electrochemistry, c2001" . _:b447iddOtlocdOtgovauthoritiessubjectssh2008107752 "found" . _:b453iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b453iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b453iddOtlocdOtgovauthoritiessubjectssh2008107752 "2008-03-04T00:00:00"^^ . _:b453iddOtlocdOtgovauthoritiessubjectssh2008107752 "new"^^ . _:b453iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b453iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b461iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b461iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b461iddOtlocdOtgovauthoritiessubjectssh2008107752 "2008-03-05T08:02:25"^^ . _:b461iddOtlocdOtgovauthoritiessubjectssh2008107752 "revised"^^ . _:b461iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b461iddOtlocdOtgovauthoritiessubjectssh2008107752 . . "Microelectronics--Congresses"@en . "[Record generated for validation purposes.]" . . _:b475iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b475iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b475iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b475iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b475iddOtlocdOtgovauthoritiessubjectssh2008107752 "2008-03-04T00:00:00"^^ . _:b475iddOtlocdOtgovauthoritiessubjectssh2008107752 "new"^^ . _:b483iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b483iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b483iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b483iddOtlocdOtgovauthoritiessubjectssh2008107752 . _:b483iddOtlocdOtgovauthoritiessubjectssh2008107752 "2008-03-05T08:02:25"^^ . _:b483iddOtlocdOtgovauthoritiessubjectssh2008107752 "revised"^^ .