Microlithography
URI(s)
- http://id.loc.gov/authorities/subjects/sh85084858
- http://id.loc.gov/authorities/sh85084858#concept
Broader Terms
Narrower Terms
Closely Matching Concepts from Other Schemes
Narrower Concepts from Other Schemes
LC Classification
- TK7872.M3
Instance Of
Scheme Membership(s)
Collection Membership(s)
Change Notes
- 1986-02-11: new
- 2014-12-18: revised
Alternate Formats