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Bibframe Work

Title
Process and equipment control in microelectronic manufacturing II
Type
Text
Monograph
Contribution
Fallon, Martin (Contributor)
Society of Photo-optical Instrumentation Engineers (Contributor)
Scottish Enterprise (Contributor)
European Optical Society (Contributor)
Institution of Electrical Engineers (Contributor)
Subject
Microelectronics industry--Production control--Congresses (LCSH)
Integrated circuits--Very large scale integration--Design and construction--Congresses (LCSH)
Microelectronics--Materials--Congresses (LCSH)
Genre Form
Conference papers and proceedings (LCGFT)
Language
English
Illustrative Content
Illustrations
Classification
LCC: TK7836 .P723 2001
DDC: 621.381 full
Could not render: bf:status
Supplementary Content
bibliography
index
Content
text
Authorized Access Point
Process and equipment control in microelectronic manufacturing II
Admin Metadata
Generation Process: DLC marc2bibframe2 v2.5.0
Status: changed
Encoding Level: full
Description Conventions: Anglo-American cataloguing rules
Identified By: bf:Local, 12848387
Change Date: 2002-09-07T15:01:57
Creation Date: 2002-07-10
Description Modifier: United States, Library of Congress
Description Authentication:
Non-rendered Predicates: lclocal:d906 lclocal:d925 lclocal:d955 bf:assigner