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Bibframe Work

Title
Digital holography for MEMS and microsystem metrology
Type
Text
Monograph
Subject
Microelectromechanical systems--Measurement (LCSH)
Microelectronics--Measurement (LCSH)
Holographic testing (LCSH)
Image processing--Digital techniques (LCSH)
Language
English
Illustrative Content
Illustrations
Classification
LCC: TK7875 .D54 2011
DDC: 621.381 full
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Supplementary Content
bibliography
index
Content
text
Authorized Access Point
Digital holography for MEMS and microsystem metrology