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Bibframe Work

Title
Distributed large-scale dimensional metrology
Type
Text
Monograph
Contribution
Franceschini, Fiorenzo (Author)
Subject
Metrology (LCSH)
Integrated circuits--Very large scale integration (LCSH)
Optical measurements (LCSH)
Language
English
Illustrative Content
Illustrations
Classification
LCC: MLCM 2017/43918 (T)
Could not render: bf:status
Supplementary Content
bibliography
index
Content
text
Authorized Access Point
Distributed large-scale dimensional metrology
Admin Metadata
Generation Process: DLC marc2bibframe2 v2.5.0
Status: changed
Encoding Level: minimal
Identified By: bf:Local, 17624783
Change Date: 2018-08-01T16:01:13
Creation Date: 2013-02-13
Description Language: English
Description Modifier: United States, Library of Congress
Non-rendered Predicates: bf:assigner