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Bibframe Work

Title
Lithography for VLSI
Type
Text
Language
English
Illustrative Content
illustrations
Classification
LCC: TK7874 .V56 vol. 16 (Source: dlc)
DDC: 621.381/73 s full (Assigner: dlc)
DDC: 621.381/73 full (Assigner: dlc)
Identified By
Lccn: 86032156
Authorized Access Point
Einspruch, Norman G. Lithography for VLSI
Authorized Access Point Variant
Watts, R. K. (Roderick K.), 1939- Lithography for VLSI