The Library of Congress > Linked Data Service > BIBFRAME Works

Bibframe Work

Title
Silicon processing for the VLSI era Silicon processing for the VLSI era
Type
Text
Language
English
Illustrative Content
illustrations
Classification
LCC: TK7874 .W635 1986 (Source: dlc)
DDC: 621.381/73 full (Assigner: dlc)
Identified By
Lccn: 86081923
Table Of Contents
v. 1. Process technology
v. 2. Process integration
v. 3. The submicron MOSFET.
Authorized Access Point
Wolf, Stanley, 1943- Silicon processing for the VLSI era
Authorized Access Point Variant
Tauber, Richard N. Silicon processing for the VLSI era