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BIBFRAME Instances
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BIBFRAME Works
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2000s
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Symposium on Fundamental Gas-Phase and Surface Chemistry of Vaper-Phase Materials Synthesis (2nd : 2001 : Washington, D.C.) Fundamental gas-phase and surface chemistry of vapor-phase deposition II and Process control, diagnostics and modeling in semiconductor manufacturing IV Pennington, NJ: Electrochemical Society; c2001
BIBFRAME Instances
Instance
12443997
2.
Symposium on Fundamental Gas-Phase and Surface Chemistry of Vaper-Phase Materials Synthesis (2nd : 2001 : Washington, D.C.) Fundamental gas-phase and surface chemistry of vapor-phase deposition II and Process control, diagnostics and modeling in semiconductor manufacturing IV
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12443997
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