The Library of Congress > Linked Data Service

Refine your results

    No values
 
  Label Dataset Type Subdivision Identifier
1. Selected papers on resolution enhancement techniques in optical lithography

 BIBFRAME Works
 Work
Text
Monograph		 13450340
2. Optical Society of America Extreme ultraviolet lithography

 BIBFRAME Instances
 Instance 1599703
3. European Mask and Lithography Conference (30th : 2014 : Dresden, Germany) 30th European Mask and Lithography Conference

 BIBFRAME Works
 Work
Text
Monograph		 19172010
4. De Bisschop, Peter Modern optical lithography for semiconductor patterning

 BIBFRAME Instances
 Instance 23908120
5. Lin, Burn Jeng, 1942- Optical lithography

 BIBFRAME Instances
 Instance 21776685
6. Mack, Chris A. Fundamental principles of optical lithography

 BIBFRAME Instances
 Instance 15059841
7. Erdmann, Andreas Optical and EUV lithography

 BIBFRAME Instances
 Instance 21728574
8. Lin, Burn Jeng, 1942- Optical lithography

 BIBFRAME Instances
 Instance 21791304
9. Lin, Burn Jeng, 1942- Optical lithography

 BIBFRAME Instances
 Instance 15995580
10. Wong, Alfred Kwok-Kit Resolution enhancement techniques in optical lithography

 BIBFRAME Instances
 Instance 12289793
11. Mack, Chris A. Field guide to optical lithography

 BIBFRAME Instances
 Instance 14180590
12. Erdmann, Andreas Optical and EUV lithography

 BIBFRAME Instances
 Instance 21726932
13. Schellenberg, F. M., 1959- Selected papers on resolution enhancement techniques in optical lithography

 BIBFRAME Instances
 Instance 13450340
14. European Mask and Lithography Conference (30th : 2014 : Dresden, Germany) 30th European Mask and Lithography Conference

 BIBFRAME Instances
 Instance 19172010
15. European Mask and Lithography Conference (Conference) (32nd : 2016 : Dresden, Germany) 32nd European Mask and Lithography Conference

 BIBFRAME Instances
 Instance 20980314
16. European Mask and Lithography Conference (22nd : 2006 : Dresden, Germany) EMLC 2006

 BIBFRAME Instances
 Instance 14674171
17. European Mask and Lithography Conference (23rd : 2007 : Grenoble, France) EMLC 2007

 BIBFRAME Instances
 Instance 15004141
18. European Mask and Lithography Conference (24th : 2008 : Dresden, Germany) EMLC 2008

 BIBFRAME Instances
 Instance 16276896
19. OSA proceedings on extreme ultraviolet lithography

 BIBFRAME Works
 Work
Text
Monograph		 1127472
20. Hoover, Richard B. X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography

 BIBFRAME Instances
 Instance 583008


Do you need assistance with your search?