| Label | Dataset | Type | Subdivision | Identifier | |
|---|---|---|---|---|---|
| 1. | Coburn, J. W., 1932- Plasma etching and reactive ion etching New York, N.Y.: American Institute of Physics; c1982 |
BIBFRAME Instances |
Instance | 4698810 | |
| 2. | Coburn, J. W., 1932- Plasma etching and reactive ion etching |
BIBFRAME Works |
Work Text Monograph |
4698810 | |
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