| Label | Dataset | Type | Subdivision | Identifier | |
|---|---|---|---|---|---|
| 1. | Hodul, David Rapid thermal annealing/chemical vapor deposition and integrated processing Pittsburgh, Pa: Materials Research Society; c1989 |
BIBFRAME Instances |
Instance | 1510180 | |
| 2. | Sivaram, S. Chemical vapor deposition New York: Van Nostrand Reinhold; c1995 |
BIBFRAME Instances |
Instance | 3488770 | |
| 3. | Rapid thermal annealing/chemical vapor deposition and integrated processing |
BIBFRAME Works |
Work Text Monograph |
1510180 | |
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