9. |
X-ray lithography and applications of soft x-rays to technology
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BIBFRAME Works
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Work Text Monograph |
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4243371 |
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16. |
OSA proceedings on soft x-ray projection lithography
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BIBFRAME Works
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Work Text Monograph |
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1090703 |
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17. |
Materials aspects of x-ray lithography
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BIBFRAME Works
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Work Text Monograph |
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4889250 |
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19. |
Photomask and next-generation lithography mask technology XI
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BIBFRAME Works
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Work Text Monograph |
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14005596 |
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20. |
Photomask and next-generation lithography mask technology XII
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BIBFRAME Works
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Work Text Monograph |
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14199305 |
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