URI(s)
- http://id.loc.gov/authorities/subjects/sh96011316
- http://id.loc.gov/authorities/sh96011316#concept
Broader Terms
Closely Matching Concepts from Other Schemes
Sources
- found: Work cat.: 95-70374: Micromachining and microfabrication process technology, c1995.
- found: Engr. index, 1992:v. 91, p. 6819.
- notfound: ASTI
Instance Of
Scheme Membership(s)
Collection Membership(s)
Change Notes
- 1996-12-02: new
- 1997-01-16: revised
Alternate Formats
