found: Work cat.: Samudrala, G.K. Multivariable study on homoepitaxial growth of diamond on planar and non-planar substrates, 2009.
found: Lyshevski, S.E. Nano- and micro-electromechanical systems, 2005:p. 113 (Epitaxial growth allows one to grow a single crystalline layer upon a single crystalline substrate. Homoepitaxy is the growth of the same type of material on the substrate)
found: Semiconductor nanostructures for optoelectronic applications, 2004:p. 16 (term epitaxy can be further qualified depending on the relationship between the film and substrate: Homoepitaxy is employed when the film and the substrate are the same material)
found: Wikipedia, Apr. 29, 2010(Epitaxy; Homoepitaxy is a kind of epitaxy performed with only one material. In homoepitaxy, a crystalline film is grown on a substrate or film of the same material; this technology is used to grow a film which is more pure than the substrate and to fabricate layers having different doping levels)
