Chemical vapor deposition
URI(s)
Variants
CVD (Chemical vapor deposition)
Deposition, Chemical vapor
Vapor deposition, Chemical
Broader Terms
Narrower Terms
Closely Matching Concepts from Other Schemes
Broader Concepts from Other Schemes
Sources
found: Work cat.: 93-230212: European Conference on Chemical Vapour Deposition ... c1989(CVD)
found: ASTI(Chemical vapor deposition equipment: CVD processes)
found: Acad. press dict. sci. tech.(A technique for coating the surface of a solid by exposure to a vapor, usually a metal halide vapor, under pressure of ... while allowing the vapor to undergo thermal decomposition or hydrogen reduction.)
found: McGraw-Hill dict. sci. tech.(Growth of thin solid films on a crystaline substrate as the result of thermochemical vapor phase reactions (CVD))
found: Engr. index:v. 89, pt. VI, p. 1979 (Chemical vapor deposition (CVD))
found: LC database, 2/8/94(Chemical vapor deposition; CVD)
LC Classification
Instance Of
Scheme Membership(s)
Collection Membership(s)
Change Notes
1994-02-17: new
1994-03-31: revised
Alternate Formats
