Microelectromechanical systems
URI(s)
Variants
MEMS (Microelectromechanical systems)
Micro-electro-mechanical systems
Micro-machinery
Microelectromechanical devices
Micromachinery
Micromachines
Micromechanical devices
Micromechanical systems
Broader Terms
Narrower Terms
Related Terms
Closely Matching Concepts from Other Schemes
Broader Concepts from Other Schemes
Sources
found: Work cat.: 96069475: Microelectronic structures and MEMS for optical processing II, 1996:p. 4 (Microelectromechanical systems) p. 12 (whether they are called Micro-Electro-Mechanical Systems (MEMS), micromechanical systems, micromachines, or MicroSystems Technology, these manufacturing based technologies are enabling the development and production of many new exciting products)
found: Eng. ind.(subject: Microelectromechanical devices)
found: BPI(subjects: Microelectromechanical systems; Micromachines)
found: ASTI on FirstSearch, Sept. 26, 1997(subjects: Micromachines; Mechatronics; titles: Microelectromechanical systems; micro machinery, etc.)
found: INSPEC on FirstSearch(descriptor: Micromechanical devices; titles: microelectromechanical systems, etc.)
found: LC database, Sept. 26, 1997(in titles: Micro electro mechanical systems; Microelectromechanical systems; micromachines; microelectromechanical devices)
found: Univ. of Wash. Center for Applied Microtechnology (CAM) WWW home page, Dec. 12, 2001:What is CAM? (This new discipline of microtechnology embraces ... microelectronics and ... microelectromechanical systems)
notfound: The electronics handbook, 1996.
LC Classification
Instance Of
Scheme Membership(s)
Collection Membership(s)
Change Notes
2002-01-10: new
2002-03-12: revised
Alternate Formats
