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Bibframe Instance

Title
Micromachining technology for micro-optics and nano-optics V and Microfabrication process technology XII: 22-24 January 2007, San Jose, California, USA
Identified By
Lccn: 2007297951
Isbn: 9780819465757 (pbk)
Isbn: 0819465755 (pbk)
Local: ocn123347438 (assigner)
Local: 123347438 (assigner)
Supplementary Content
Includes bibliographical references and author index.
Note
Physical details: ill.
Some previous conferences entitled: Micromachining and microfabrication process technology.
Dimensions
28 cm.
Extent
1 v. (various pagings)
Provision Activity
Publication: Washington (State) 2007
Publication: Bellingham, Wash: SPIE; c2007
Responsibility Statement
Mary-Ann Maher ... [et al.], editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Issuance
single unit