Bibframe Instance
TitleAnalytical and diagnostic techniques for semiconductor materials, devices, and processes 7 / editors: D.K. Schroder .... [et al.]Identified ByLccn: 2008276638Isbn: 9781566775694Isbn: 1566775698 Supplementary ContentIncludes bibliographical references and index.NotePhysical details: ill."VII Symposium ... part of the fall Electrochemical Society meeting in Washington, DC, held on October 7-12, 2007....seventh meeting"--P. iii.Sponsoring divisions: Electronics and Photonics; Dielectric Science & Technology.Dielectric and semiconductor materials, devices, and processingDimensions23 cm.Extentviii, 394 p.Provision ActivityPublication: New Jersey 2007 Publication: Pennington, NJ: Electrochemical Society; c2007