Bibframe Instance

Title

Extreme ultraviolet lithography: summaries of papers presented at the topical meeting, Extreme Ultraviolet Lithography, September 19-21, 1994, Monterey, California

Identified By

Lccn: 94065374

Isbn: 1557523622

Supplementary Content

Includes bibliographical references and index.

Dimensions

28 cm.

Extent

ix, 146 p.

Provision Activity

Publication: District of Columbia 1994

Publication: Washington, DC: The Society; c1994

Responsibility Statement

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