Bibframe Instance

Title

Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96)

Identified By

Isbn: 9033437589 (pbk)

Local: 38273653 (assigner)

Supplementary Content

Includes bibliographical references and index.

Note

Physical details: ill.

Dimensions

28 cm.

Extent

349 p.

Provision Activity

Publication: Belgium 1996

Publication: Leuven: Acco; 1996

Responsibility Statement

Marc Heyns (editor), Marc Meuris & Paul Mertens (co-editors)

Media

Issuance

Edition Statement

1st. ed.

Admin Metadata

Generation Process: DLC marc2bibframe2 v2.5.0

Status: changed

Encoding Level: full

Identified By: bf:Local, 217770

Change Date: 2006-01-06T09:25:55

Creation Date: 1999-02-23

Description Authentication: LC Copy Cataloging

Assigner: LUP