Bibframe Instance

Title

Proceedings of the Thirteenth Annual Symposium of the Greater New York Chapter of the AVS on plasma and ion-beam processing, 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, New York

Identified By

Lccn: 82073041

Isbn: 0883184052

Supplementary Content

Includes bibliographical references and index

Note

physical details: ill.

"Also published in the 1982 September/October issue of the Journal of vacuum science and technology, vol. 21, no. 3"--T.p. verso.

Dimensions

29 cm

Extent

p. 725-815

Provision Activity

Publication: New York (State) 1982

Publication: New York: Published for the American Vacuum Society by the American Institute of Physics, 1982

Responsibility Statement

special editors for the proceesings, Roger Kelly and J.J. Cuomo ; program committee, J.J. Cuomo ... [et al.] ; workshop aids, V.A. Fastiggi, R.J. Cuomo, and S.M. Kelly

Media

unmediated

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Issuance

single unit

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Admin Metadata

Status: new

Date: 1982-07-26

Agent: United States, Library of Congress

Admin Metadata

Status: changed