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Bibframe Instance

Title
Submicron lithography
Identified By
Lccn: 82060280
Isbn: 0892523689 (pbk)
Supplementary Content
Includes bibliographical references and indexes.
Note
Physical details: ill.
Dimensions
28 cm.
Extent
viii, 179 p.
Provision Activity
Publication: Washington (State) 1982
Publication: Bellingham, Wash: International Society for Optical Engineering; 1982
Responsibility Statement
Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California
Media
unmediated
Issuance
single unit
Admin Metadata
Generation Process: DLC marc2bibframe2 v2.5.0
Status: new
Encoding Level: full
Description Conventions: Anglo-American cataloguing rules
Identified By: bf:Local, 3752512
Change Date: 1982-12-02T00:00:00
Creation Date: 1982-12-01
Description Modifier: United States, Library of Congress
Assigner: United States, Library of Congress