Bibframe Instance

Title

Excimer laser lithography

Identified By

Isbn: 0819402710

Isbn: 0819402729 (hard)

Supplementary Content

Includes bibliographical references (p. 193-207).

Note

Physical details: ill.

Dimensions

26 cm.

Extent

x, 212 p.

Provision Activity

Publication: Bellingham, Wash., USA: SPIE Optical Engineering Press; c1990

Responsibility Statement

Kanti Jain

Media

Issuance

Acquisition Terms

$35.00 (est.)$50.00 (est.)

Admin Metadata

Generation Process: DLC marc2bibframe2 v2.5.0

Status: prepublication

Encoding Level: full

Identified By: bf:Local, 3871905

Change Date: 1990-04-12T16:46:41

Creation Date: 1989-09-29

Assigner: United States, Library of Congress