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Bibframe Work

Title
Low-k nanoporous interdielectrics
Type
Text
Monograph
Contribution
Ree, Moonhor (Contributor)
Yoon, Jinhwan (Contributor)
Heo, Kyuyoung (Contributor)
Subject
Dielectric films (LCSH)
Microelectronics--Materials (LCSH)
Porous materials (LCSH)
Interconnects (Integrated circuit technology) (LCSH)
Language
English
Illustrative Content
Illustrations
Classification
LCC: TK7871.15.F5 R44 2010 (Assigner: dlc) (Status: used by assigner)
DDC: 621.381 full (Assigner: dlc)(Source: 22)
Supplementary Content
bibliography
index
Content
text
Authorized Access Point
Ree, Moonhor Low-k nanoporous interdielectrics
Admin Metadata
Generation Process: DLC marc2bibframe2 v2.5.0
Status: changed
Encoding Level: core
Description Conventions: Anglo-American cataloguing rules
Identified By: bf:Local, 16219544
Change Date: 2020-06-17T15:56:41
Creation Date: 2010-05-06
Assigner: United States, Library of Congress