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Bibframe Work

Title
Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography
Type
Text
Monograph
Subject
X-ray astronomy--Congresses (LCSH)
Ultraviolet astronomy--Congresses (LCSH)
Grazing incidence--Congresses (LCSH)
Mirrors--Design and construction--Congresses (LCSH)
Extreme ultraviolet lithography.--Congresses. (LCSH)
X-ray lithography--Congresses (LCSH)
Language
English
Illustrative Content
Illustrations
Classification
LCC: QB472.A1 M86 1993 (Assigner: dlc) (Status: used by assigner)
DDC: 522/.6863 full (Assigner: dlc)(Source: 20)
Supplementary Content
bibliography
index
Content
text
Authorized Access Point
Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography